本文结合国内外研究情况,概括性介绍了用于啁啾脉冲放大系统中的多层介质膜脉冲压缩光栅的激光损伤特性研究进展,包括多层介质膜的损伤、表面浮雕结构的损伤,以及介质膜光栅损伤的影响因素.在关于介质膜光栅激光损伤的影响因素中又分别介绍了槽型结构、制备工艺、激光参数、脉冲数量、热应力和杂质缺陷对其抗激光损伤阈值的影响.最后,从结构设计、制备工艺以及后期处理等方面,介绍了提高多层介质膜光栅抗激光损伤阈值的常用方法.
According to domestic and worldwide research situations of the multi-layer system,the research progresses of their laser induced damage characteristics are introduced in the present paper.The introduction mainly includes the damage characteristics of multilayer dielectric films,the damage characteristics of surface relief structure and the corresponding influence factors.Among them,the influence of groove structure,fabrication process,laser parameters,pulse number,thermal stress and impurity defect on the laser damage characterizes of the dielectric film grating are discussed in details.Finally,from the aspects of structure design,preparation process and post treatment etc.,the commonly used methods to improve the laser damage threshold of the multilayer dielectric grating were presented.
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